Product Overview
Thermal mass flow controllers provide accurate gas flow measurement and automatic closed‑loop control with fast response, high repeatability, and digital communication for laboratory and industrial applications.
Mass Flow Controllers
| Feature | Specification |
|---|---|
| Product Type | Thermal Mass Flow Controller |
| Measurement Principle | Thermal heat‑transfer (mass flow measurement) |
| Control Method | Closed‑loop control with integrated proportional valve |
| Measured Media | Clean, dry gases (air, N₂, O₂, H₂, Ar, CH₄, specialty gases) |
| Flow Range | sccm to thousands of slpm (model dependent) |
| Accuracy | Typically ±1% of reading |
| Repeatability | ±0.1–0.25% of reading |
| Response Time | <1 second typical |
| Operating Pressure | Typically up to 20 bar (higher for industrial versions) |
| Operating Temperature | –10°C to +60°C (electronics) |
| Inputs / Outputs | Setpoint & feedback: 0–5 V, 4–20 mA |
| Communication | Modbus, RS‑485, Profibus, EtherCAT, DeviceNet, Ethernet |
| Applications | Gas dosing, blending, burner control, lab automation, OEM systems |
